Andreas Rathsfeld

Publications

746

Citations

H-Index

1984

Active since

Affiliations

Weierstrass Institute for Applied Analysis and Stochastics(Current)

Physikalisch-Technische Bundesanstalt

Chongqing University

Forschungsverbund Berlin

University of Delaware

Andreas Rathsfeld is an author at Weierstrass Institute for Applied Analysis and Stochastics specializing in engineering, numerical analysis, and inverse problems.

ORCID

Top concepts

EngineeringNumerical AnalysisInverse ProblemsNatural SciencesComputational GeometryApplied PhysicsGeometry ModelingOptical PropertiesComputational ImagingPhysics

Publications per year

1984–2021

Publications

Mathematical modelling of indirect measurements in scatterometry

R. Model, M. Bär, M. Wurm et al. · Measurement · 2006 · 73 citations

Radar, Engineering, Measurement +8

The Invertibility of the Double Layer Potential Operator in the Space of Continuous Functions Defined on a Polyhedron: The Panel Method

Andreas Rathsfeld · Applicable Analysis · 1992 · 42 citations

Numerical Analysis, Polyhedral Boundary, Method Of Fundamental Solution +11

Modeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometry

Mark-Alexander Henn, Sebastian Heidenreich, Andreas Rathsfeld et al. · Applied Optics · 2012 · 39 citations

Engineering, Electron-beam Lithography, Microscopy +17

Profile reconstruction in extreme ultraviolet (EUV) scatterometry: modeling and uncertainty estimates

Andreas Rathsfeld, Frank Scholze, M. Bär · Measurement Science and Technology · 2009 · 39 citations

Numerical Analysis, Engineering, Wave Optic +28

A spline collocation method for singular integral equations with piecewise continuous coefficients

Siegfried Pr��dorf, Andreas Rathsfeld · Integral Equations and Operator Theory · 1984 · 38 citations

Numerical Analysis, Method Of Fundamental Solution, Piecewise Continuous Coefficients +9

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