Concepedia

Shoichi Mizuo

SM

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Publications

11

Citations

455

H-Index

10

Active since

1981

Affiliations

Hitachi (Japan)(Current)

Shoichi Mizuo is an author at Hitachi (Japan) specializing in silicon materials, electronic materials, and materials science.

Publications per year

1981–1983

11

Publications

11

Retardation of Sb Diffusion in Si during Thermal Oxidation

Shoichi Mizuo, Hisayuki Higuchi · Japanese Journal of Applied Physics · 1981 · 144 citations

, , +16

Effect of Si and SiO2 thermal nitridation on impurity diffusion and oxidation induced stacking fault size in Si

Shoichi Mizuo, Takahisa Kusaka, Akira Shintani et al. · Journal of Applied Physics · 1983 · 74 citations

, , +17

Anomalous Diffusion of B and P in Si Directly Masked with Si<sub>3</sub>N<sub>4</sub>

Shoichi Mizuo, Hisayuki Higuchi · Japanese Journal of Applied Physics · 1982 · 50 citations

, , +17

Effect of Back‐Side Oxidation on B and P Diffusion in Si Directly Masked with Si3 N 4 Films

Shoichi Mizuo, Hisayuki Higuchi · Journal of The Electrochemical Society · 1982 · 40 citations

, , +17

Effects of Back‐Side Oxidation of Si Substrates on Sb Diffusion at Front Side

Shoichi Mizuo, Hiroyoshi Higuchi · Journal of The Electrochemical Society · 1983 · 39 citations

, , +17

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