Concepedia

Chi-Shan Lu

CL

Statistics

Publications

1

Citations

34

H-Index

1

Active since

1979

Affiliations

National Yang Ming Chiao Tung University(Current)

Chi-Shan Lu is an author at National Yang Ming Chiao Tung University specializing in microfabrication, plasma physics, and engineering.

Top concepts

Publications per year

1979–1979

1

Publications

1

CF4 plasma etching on LiNbO3

C. L. Lee, Chi-Shan Lu · Applied Physics Letters · 1979 · 34 citations

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