Concepedia

M. Eckel

ME

3

Publications

53

Citations

3

H-Index

1994

Active since

Affiliations

University of Stuttgart(Current)

M. Eckel is an author at University of Stuttgart specializing in applied physics, engineering, and chemical engineering.

Top concepts

Publications per year

1994–1999

3

Publications

3

Selective area epitaxy of GaInAs using conventional and novel group III precursors

F. Scholz, D. Ottenwälder, M. Eckel et al. · Journal of Crystal Growth · 1994 · 24 citations

, , +8

Influence of process parameters on the growth of TiN in different sized plasma-assisted chemical vapor deposition reactors

P. von der Hardt, M. Eckel, Martin Schmidt et al. · Surface and Coatings Technology · 1999 · 19 citations

, , +7

Investigation of TiN deposition in different sized PACVD reactors by means of optical emission spectroscopy

M. Eckel, P. von der Hardt, Martin Schmidt · Surface and Coatings Technology · 1999 · 10 citations

, , +9

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