Cheongbin Cheon

Importance of higher‐level excited species in argon remote plasma sources: Numerical modeling with consideration of detailed chemical reaction pathways

Cheongbin Cheon, Jung‐Hwan Yoon, Sanghyun Jo et al. · Plasma Processes and Polymers · 2022 · 11 citations

Natural Sciences, Chemistry, Physics +17

Multi-dimensional electrostatic plasma simulations using the particle-in-cell method for the low-temperature plasmas for materials processing

Young Hyun Jo, Cheongbin Cheon, Heesung Park et al. · Journal of the Korean Physical Society · 2022 · 10 citations

Natural Sciences, Materials Science, Physics +13

Experimental evidence of various mode numbers of azimuthal waves in an <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML"> <mml:mrow> <mml:mrow> <mml:mi>E</mml:mi> </mml:mrow> </mml:mrow> <mml:mo>×</mml:mo> <mml:mrow> <mml:mrow> <mml:mi>B</mml:mi> </mml:mrow> </mml:mrow> </mml:math> Penning source for semiconductor processing

Cheongbin Cheon, Jin‐Young Choi, John Koo et al. · Plasma Sources Science and Technology · 2023 · 10 citations · Full text

Natural Sciences, Electrical Engineering, Physics +11