Concepedia

Paul J. Tompkins

PJ

Statistics

Publications

3

Citations

45

H-Index

3

Active since

1988

Affiliations

M Corp (United States)(Current)

Paul J. Tompkins is an author at M Corp (United States) specializing in optoelectronics, engineering, and ophthalmology.

Top concepts

Publications per year

1988–2005

3

Publications

3

High-index materials for 193 nm immersion lithography

John H. Burnett, Simon G. Kaplan, Eric L. Shirley et al. · Optical Microlithography XVIII · 2005 · 22 citations

, , +16

Depth of focus and resolution enhancement of i-line and deep-UV lithography using annular illumination

William N. Partlo, Paul J. Tompkins, Paul G. Dewa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 13 citations

, , +20

<title>Performance Of A KrF Excimer Laser Stepper</title>

Roger McCleary, Paul J. Tompkins, M. D. Dunn et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1988 · 10 citations

, , +13

1–3 of 3