1
Publications
23
Citations
1
H-Index
1980
Active since
Affiliations
General Electric (United States)(Current)
T. Coutumas is an author at General Electric (United States) specializing in engineering, applied physics, and microelectronics.
Publications per year
1980–1980
1
1
Reactive ion beam etching of SiO2 and polycrystalline silicon
D.M. Brown, Barbara A. Heath, T. Coutumas et al. · Applied Physics Letters · 1980 · 23 citations · Full text
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