U. Niggebrügge

Reactive ion beam etching of InP with N2 and N2/O2 mixtures

W. Katzschner, U. Niggebrügge, Ronny Löffler et al. · Applied Physics Letters · 1986 · 29 citations

Materials Science, N2/o2 Mixtures, N2 Ribe +15

Integrated-optic polarisation convertor on (001)-InP substrate

M. Schlak, H.-P. Nolting, P. Albrecht et al. · Electronics Letters · 1986 · 22 citations

Photonics, Electrical Engineering, Optical Materials +11

Selective embedded growth of GaInAs by low pressure MOVPE

Oliver Kayser, B. Opitz, R. Westphalen et al. · Journal of Crystal Growth · 1991 · 16 citations

Materials Engineering, Materials Science, Ii-vi Semiconductor +5

Passive optical GaInAsP/InP waveguides

C. Bornholdt, W. Döldissen, Daniel Franke et al. · Electronics Letters · 1983 · 12 citations

Photonics, Optical Materials, Engineering +9

A novel process for reactive ion etching on InP, using CH4/H2

U. Niggebrügge · Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft) · 1986 · 10 citations