Marcelo A. Martínez-Puente

ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies

Marcelo A. Martínez-Puente, Paul Horley, F. S. Aguirre‐Tostado et al. · Materials Science and Engineering B · 2022 · 49 citations · Full text

Properties of Al2O3 Thin Films Grown by PE-ALD at Low Temperature Using H2O and O2 Plasma Oxidants

Jhonathan Castillo-Sáenz, N. Nedev, Benjamín Valdez et al. · Coatings · 2021 · 29 citations · Full text

Materials Science, Surface Technology, Al2o3 Layers +15

In-situ X-ray photoelectron spectroscopy analysis of the initial growth of CdS thin films by chemical bath deposition

R.G. Garza, A. Carrillo‐Castillo, V.H. Martínez-Landeros et al. · Thin Solid Films · 2019 · 19 citations

Materials Science, Ii-vi Semiconductor, Engineering +8

Growth of ZnO thin films at low temperature by plasma-enhanced atomic layer deposition using H2O and O2 plasma oxidants

Jhonathan Castillo-Sáenz, N. Nedev, Benjamín Valdez et al. · Journal of Materials Science Materials in Electronics · 2021 · 11 citations

Materials Science, Engineering, Nanotechnology +10

Unintentional Hydrogen Incorporation into the SnO₂ Electron Transport Layer by ALD and Its Effect on the Electronic Band Structure

Marcelo A. Martínez-Puente, Juan Tirado, Franklin Jaramillo et al. · ACS Applied Energy Materials · 2021 · 11 citations