Concepedia

X.R. Liu

XL

2

Publications

44

Citations

2

H-Index

2012

Active since

Affiliations

South China University of Technology(Current)

X.R. Liu is an author at South China University of Technology specializing in applied physics, engineering, and microfabrication.

Top concepts

EngineeringApplied PhysicsMicrofabricationEducationCalibrationMeasurementMicrostructureInstrumentationMaterial ScienceMicroelectronics

Publications per year

2012–2013

2

Publications

2

Dry micro-grooving on Si wafer using a coarse diamond grinding

Jin Xie, Hailong Xie, X.R. Liu et al. · International Journal of Machine Tools and Manufacture · 2012 · 32 citations

Materials Science, Wafer Scale Processing, Coarse Diamond Grinding +6

Evaluation on 3D micro-ground profile accuracy of micro-pyramid-structured Si surface using an adaptive-orientation WLI measurement

Jin Xie, X.R. Liu, K.K. Wu et al. · Precision Engineering · 2013 · 12 citations

Sensor Calibration, Wafer Scale Processing, Engineering +13

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