Concepedia

T. Sebald

TS

Statistics

Publications

6

Citations

199

H-Index

6

Active since

1996

Affiliations

Leibniz Institute for Solid State and Materials Research(Current)

T. Sebald is an author at Leibniz Institute for Solid State and Materials Research specializing in applied physics, engineering, and magnetism.

Top concepts

Publications per year

1996–2000

6

Publications

6

Plasma diagnostic studies to the carbon nitride film deposition by reactive r.f. magnetron sputtering

R. Kaltofen, T. Sebald, G. Weise · Thin Solid Films · 1996 · 77 citations

, , +9

Low-energy ion bombardment effects in reactive rf magnetron sputtering of carbon nitride films

R. Kaltofen, T. Sebald, G. Weise · Thin Solid Films · 1997 · 39 citations

, , +5

DC reactive magnetron sputter deposition of (111) textured TiN films — influence of nitrogen flow and discharge power on the texture formation

S. Groudeva‐Zotova, R. Kaltofen, T. Sebald · Surface and Coatings Technology · 2000 · 30 citations

, , +10

Ion bombardment diagnostics in a nitrogen RF magnetron sputtering discharge

R. Kaltofen, T. Sebald, G. Weise · Surface and Coatings Technology · 1997 · 21 citations

, , +3

Plasma substrate interaction effects on composition and chemical structure of reactively r.f. magnetron sputtered carbon nitride films

R. Kaltofen, T. Sebald, Jonas Schulte et al. · Thin Solid Films · 1999 · 18 citations

, , +7

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