Tenghao Ma

A global model of 2.45 GHz ECR ion sources for high intensity H+, H2+ and H3+ beams

Wenbin Wu, Ailin Zhang, Shixiang Peng et al. · Vacuum · 2020 · 21 citations

Electrical Engineering, Global Model, Radiation Generation +4

Possibility of generating H+, or H2+, or H3+ dominated ion beams with a 2.45 GHz permanent magnet ECR ion source

Shixiang Peng, Wenbin Wu, Haitao Ren et al. · Review of Scientific Instruments · 2019 · 17 citations

Status of high current H2+ and H3+ ion sources

Wenbin Wu, Shixiang Peng, Tenghao Ma et al. · Review of Scientific Instruments · 2019 · 15 citations

Electrical Engineering, Pmecr Ii, Engineering +8

Plasma simulation and optimization for a miniaturized antenna ECR ion source

Shixiang Peng, Ailin Zhang, Wenbin Wu et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2021 · 15 citations · Full text

Electrical Engineering, Engineering, Aerospace Engineering +4

A miniaturized ECR plasma flood gun for wafer charge neutralization

Yaoxiang Jiang, Shixiang Peng, Wenbin Wu et al. · Review of Scientific Instruments · 2020 · 11 citations

Electrical Engineering, Plasma Electronics, Engineering +14