Concepedia

C. Fiori

CF

Statistics

Publications

9

Citations

255

H-Index

9

Active since

1985

Affiliations

California Institute of Technology(Current)

C. Fiori is an author at California Institute of Technology specializing in materials science, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceMaterials EngineeringPhotochemistryDefect TolerancePhysicsChemistryOptoelectronics

Publications per year

1985–2024

9

Publications

9

Ultraviolet Irradiation Induced Compaction and Photoetching in Amorphous, Thermal SiO<sub>2</sub>

C. Fiori, R. A. B. Devine · MRS Proceedings · 1985 · 46 citations

Materials Science, Photoluminescence, Engineering +5

Surface mechanisms in O2 and SF6 microwave plasma etching of polymers

O. Joubert, Jacques Pelletier, C. Fiori et al. · Journal of Applied Physics · 1990 · 36 citations

Engineering, Electron-beam Lithography, Plasma Processing +19

High resolution ultraviolet photoablation of SiO<i>x</i> films

C. Fiori, R. A. B. Devine · Applied Physics Letters · 1985 · 36 citations

Materials Science, Siox Films, Engineering +11

The Influence of Irradiation Temperature on U.V. Induced Defect Creation in Dry Silica

R. A. B. Devine, C. Fiori, J. David Robertson · MRS Proceedings · 1985 · 30 citations

Materials Engineering, Materials Science, Engineering +6

Resist degradation under plasma exposure: Synergistic effects of ion bombardment

O. Joubert, C. Fiori, J.C. Oberlin et al. · Journal of Applied Physics · 1991 · 29 citations

Engineering, Glow Discharge, Resist Degradation +18

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