Concepedia

Jyothi Singh

JS

3

Publications

146

Citations

3

H-Index

1990

Active since

Affiliations

IBM (United States)(Current)

Jyothi Singh is an author at IBM (United States) specializing in engineering, applied physics, and physics.

Top concepts

Publications per year

1990–1995

3

Publications

3

Role of the chamber wall in low-pressure high-density etching plasmas

James A. O’Neill, Jyothi Singh · Journal of Applied Physics · 1995 · 84 citations

, , +14

Ultraviolet absorption spectroscopy for the detection of CF2 in high-density plasmas

James A. O’Neill, Jyothi Singh · Journal of Applied Physics · 1994 · 38 citations

, , +19

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> infrared diagnostics of particle forming etch plasmas

James A. O’Neill, Jyothi Singh, G. Gifford · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 24 citations

, , +19

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