Statistics
Publications
1
Citations
12
H-Index
1
Active since
2002
Affiliations
Oki Electric Industry (Japan)(Current)
Ryoji Shigemasa is an author at Oki Electric Industry (Japan) specializing in etching processes, etch chemistry, and engineering.
Publications per year
2002–2002
1
1
Control of electro-chemical etching for uniform 0.1 μm gate formation of HEMT
Yuichi Nitta, T. Ohshima, Ryoji Shigemasa et al. · 2002 · 12 citations
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