Concepedia

S. D. Park

SD

Statistics

Publications

2

Citations

44

H-Index

2

Active since

2007

Affiliations

Sungkyunkwan University(Current)

S. D. Park is an author at Sungkyunkwan University specializing in materials engineering, microfabrication, and applied physics.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationMaterials EngineeringPhysicsOptoelectronicsChemical Engineering

Publications per year

2007–2008

2

Publications

2

Precise Depth Control and Low-Damage Atomic-Layer Etching of HfO[sub 2] using BCl[sub 3] and Ar Neutral Beam

S. D. Park, W. S. Lim, B. J. Park et al. · Electrochemical and Solid-State Letters · 2008 · 25 citations

Engineering, Electron-beam Lithography, Precise Depth Control +19

Surface Analysis of Atomic-Layer-Etched Silicon by Chlorine

Chaeyoun Oh, S. D. Park, H. C. Lee et al. · Electrochemical and Solid-State Letters · 2007 · 19 citations

Materials Science, Materials Engineering, Silicon Alet +12

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