14
Publications
228
Citations
11
H-Index
2016
Active since
V. A. Semenov is an author at Institute of High Current Electronics specializing in engineering, applied physics, and microelectronics.
Top concepts
EngineeringApplied PhysicsMicroelectronicsMaterial SciencePhysicsElectrical EngineeringMagnetismThin FilmsPulse PowerSurface Science
Publications per year
2016–2023
14
14
Short-pulse high-power dual magnetron sputtering
V. A. Semenov, A.S. Grenadyorov · Vacuum · 2022 · 20 citations
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1–5 of 14