Concepedia

Toshiya Yamato

TY

3

Publications

76

Citations

3

H-Index

1980

Active since

Affiliations

The University of Osaka(Current)

Toshiya Yamato is an author at The University of Osaka specializing in applied physics, microfabrication, and microelectronics.

Top concepts

Publications per year

1980–1981

3

Publications

3

Fabrication of SiO<sub>2</sub>Blazed Holographic Gratings by Reactive Ion-Etching

Shinji Matsui, Toshiya Yamato, Hiroaki Aritome et al. · Japanese Journal of Applied Physics · 1980 · 31 citations

, , +16

Microfabrication of LiNbO<sub>3</sub> by Reactive Ion-Beam Etching

Shinji Matsui, Toshiya Yamato, Hiroaki Aritome et al. · Japanese Journal of Applied Physics · 1980 · 28 citations

, , +11

Reactive Ion-Beam Etching of Silicon Carbide

Shinji Matsui, Sin'ya Mizuki, Toshiya Yamato et al. · Japanese Journal of Applied Physics · 1981 · 17 citations

, , +13

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