Concepedia

Takeshi Kaminatsui

TK

2

Publications

53

Citations

2

H-Index

2008

Active since

Affiliations

Toshiba (Japan)(Current)

Takeshi Kaminatsui is an author at Toshiba (Japan) specializing in engineering, materials science, and energy efficiency.

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Publications per year

2008–2011

2

Publications

2

H2/N2 plasma damage on porous dielectric SiOCH film evaluated by <i>in situ</i> film characterization and plasma diagnostics

Hiroshi Yamamoto, Keigo Takeda, Kenji Ishikawa et al. · Journal of Applied Physics · 2011 · 32 citations

, , +15

Cost-effective air-gap interconnects by all-in-one post-removing process

Norimasa Nakamura, Nobutomo Matsunaga, Takeshi Kaminatsui et al. · 2008 · 21 citations

, , +12

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