Concepedia

Author

Takeshi Kaminatsui

Toshiba (Japan)

Also Known As

T. Kaminatsui, Takeshi Kaminatsui

3

Publications

61

Citations

3

H-Index

16

Concepts

All Affiliations

Toshiba (Japan)
TK

About

Takeshi Kaminatsui is an author at Toshiba (Japan) specializing in engineering, materials science, and energy efficiency.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

53

2

Applied Physics

1

1

32

3

Chemical Engineering

1

1

32

4

Chemistry

1

1

32

5

Computer Engineering

1

1

21

Takeshi Kaminatsui

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2

Publications

53

Citations

2

H-Index

YearCitations

H2/N2 plasma damage on porous dielectric SiOCH film evaluated by <i>in situ</i> film characterization and plasma diagnostics

Hiroshi Yamamoto, Keigo Takeda, Kenji Ishikawa,

Journal of Applied Physics

2011

32

Cost-effective air-gap interconnects by all-in-one post-removing process

Norimasa Nakamura, Nobutomo Matsunaga, Takeshi Kaminatsui,

2008

21

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