Statistics
Publications
1
Citations
25
H-Index
1
Active since
2016
Affiliations
Chia-Liang Yeh is an author at Industrial Technology Research Institute specializing in rigorous coupled-wave analysis, fourier optics, and high-harmonic generation.
Publications per year
2016–2016
1
1
EUV scatterometer with a high-harmonic-generation EUV source
Yi‐Sha Ku, Chia-Liang Yeh, Yi‐Chang Chen et al. · Optics Express · 2016 · 25 citations · Full text
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