Allen Cowen

Mems microrelays

Robert F. Wood, R. Mahadevan, Vijay Dhuler et al. · Mechatronics · 1998 · 34 citations

The MWS 1X4: A High Performance Wavelength Switching Building Block

T. Ducellier, Jacques Bismuth, Sophie Roux et al. · European Conference on Optical Communication · 2002 · 33 citations

Dwdm 100, Photonics, Electrical Engineering +12

<title>MEMS infrastructure: the multiuser MEMS processes (MUMPs)</title>

Karen W. Markus, David Koester, Allen Cowen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 32 citations

Mems Technologies, Flip Chip Technology, Smart Mems +15

A Silicon Micromachined Gate Valve

M. Walters, V.R. Dhuler, R. Mahadevan et al. · 1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest · 1998 · 18 citations · Full text

<title>Smart MEMS: flip chip integration of MEMS and electronics</title>

Karen W. Markus, V.R. Dhuler, Don Roberson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 14 citations

Electrical Engineering, Mems Devices, Smart Mems +15