Concepedia

Kyeong Koo

KK

Statistics

Publications

2

Citations

34

H-Index

2

Active since

1996

Affiliations

Samsung (South Korea)(Current)

Kyeong Koo is an author at Samsung (South Korea) specializing in materials science, emission intensity analysis, and quadrupole mass spectrometry.

Publications per year

1996–1998

2

Publications

2

Effects of Conductivity of Polysilicon on Profile Distortion

Kyeong Koo, Hwa Sook Shin, Won Jong Yoo et al. · Japanese Journal of Applied Physics · 1996 · 19 citations

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Enhancement of Mask Selectivity in SiO<sub>2</sub> Etching with a Phase-Controlled Pulsed Inductively Coupled Plasma

Kyoung Sub Shin, Kyeong Koo, Chang Jin Kang et al. · Japanese Journal of Applied Physics · 1998 · 15 citations

, , +17

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