Statistics
Publications
2
Citations
30
H-Index
2
Active since
2011
Affiliations
H.Q. Li is an author at Massachusetts Institute of Technology specializing in engineering, microelectromechanical systems, and mems design.
Publications per year
2011–2011
2
2
A single-stage micromachined vacuum pump achieving 164 torr absolute pressure
Hengyun Zhou, H.Q. Li, Vikas Sharma et al. · 2011 · 20 citations
1–2 of 2