Concepedia

Masumi Shira

MS

1

Publications

24

Citations

1

H-Index

2008

Active since

Affiliations

Gunma University(Current)

Masumi Shira is an author at Gunma University specializing in engineering, materials science, and optoelectronic devices.

Top concepts

PhysicsEngineeringNanotechnologySemiconductorsApplied PhysicsNanofabricationMaterial ScienceMicroelectronicsElectronic DevicesElectronic Materials

Publications per year

2008–2008

1

Publications

1

Extremely Small Proximity Effect in 30 keV Electron Beam Drawing with Thin Calixarene Resist for 20×20 nm<sup>2</sup>Pitch Dot Arrays

Sumio Hosaka, Zulfakri bin Mohamad, Masumi Shira et al. · Applied Physics Express · 2008 · 24 citations

Engineering, Electron-beam Lithography, Electron Diffraction +21

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