2
Publications
46
Citations
2
H-Index
1998
Active since
Affiliations
Technical University of Denmark(Current)
Michael Lindahl is an author at Technical University of Denmark specializing in engineering, microelectronics, and applied physics.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicroelectronicsElectronic PackagingMicrofabricationMaterials EngineeringMechanical Engineering
Publications per year
1998–2002
2
2
Si-to-Si wafer bonding using evaporated glass
R. de Reus, Michael Lindahl · 2002 · 15 citations · Full text
Materials Science, Materials Engineering, Wafer Scale Processing +13
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