Concepedia

Yeung Au

YA

Statistics

Publications

3

Citations

156

H-Index

3

Active since

2010

Affiliations

Harvard University(Current)

Yeung Au is an author at Harvard University specializing in materials science, chemical vapor deposition, and materials engineering.

Publications per year

2010–2012

3

Publications

3

Selective Chemical Vapor Deposition of Manganese Self-Aligned Capping Layer for Cu Interconnections in Microelectronics

Yeung Au, Youbo Lin, Eugene S. Beh et al. · Journal of The Electrochemical Society · 2010 · 69 citations

, , +17

Filling Narrow Trenches by Iodine-Catalyzed CVD of Copper and Manganese on Manganese Nitride Barrier/Adhesion Layers

Yeung Au, Youbo Lin, Roy G. Gordon · Journal of The Electrochemical Society · 2011 · 52 citations · Full text

, , +17

Vapor Deposition of Highly Conformal Copper Seed Layers for Plating Through-Silicon Vias (TSVs)

Yeung Au, Qing Wang, Huazhi Li et al. · Journal of The Electrochemical Society · 2012 · 35 citations · Full text

, , +17

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