Patrick Chaton

Statistics

Publications

Citations

261

H-Index

Active since

1996

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

CEA Grenoble

Laboratoire d'Électronique des Technologies de l'Information

Patrick Chaton is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in natural sciences, optics, and optical materials.

Publications per year

1996–2005

Publications

Infrared ellipsometry study of evaporated SiO2 films: Matrix densification, porosity, water sorption

A. Brunet‐Bruneau, J. Rivory, B. Rafin et al. · Journal of Applied Physics · 1997 · 67 citations

Natural Sciences, Materials Engineering, Materials Science +17

Optical Fourier transform scatterometry for LER and LWR metrology

Pierre Boher, Jerome Petit, Thierry Leroux et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 41 citations

Engineering, Materials Engineering, Materials Science +15

Microarrays and microfluidic devices: miniaturized systems for biological analysis

F. Vinet, Patrick Chaton, Yves Fouillet · Microelectronic Engineering · 2002 · 36 citations

Engineering, Bioengineering, Biomedical Engineering +14

Thin-film designs by simulated annealing

T. Boudet, Patrick Chaton, Laurent Hérault et al. · Applied Optics · 1996 · 27 citations

Natural Sciences, Computer Engineering, Design Optimization +6

Multiple wavelength fluorescence enhancement on glass substrates for biochip and cell analyses

B. Fouqué, Bernd Bastian Schaack, Patricia Obeïd et al. · Biosensors and Bioelectronics · 2004 · 27 citations

Natural Sciences, Bioengineering, Cell Biology +16

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