P. Santos-Filho

Fourier transform infrared study of rapid thermal annealing of <i>a</i>-Si:N:H(D) films prepared by remote plasma-enhanced chemical vapor deposition

Zhuo Lu, P. Santos-Filho, G. Stevens et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +17

Bonding of oxygen and nitrogen atoms in hydrogenated amorphous silicon alloys

G. Lucovsky, P. Santos-Filho, Zhuo Lu et al. · Journal of Non-Crystalline Solids · 1995 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +12

Nearest-neighbor repulsion-perturbed silicon monohydride bond-stretching vibrations in hydrogenated and deuterated silicon nitrogen alloy films

G. Lucovsky, Z. Jing, P. Santos-Filho et al. · Journal of Non-Crystalline Solids · 1996 · 16 citations

Natural Sciences, Chemistry, Materials Science +7

Molecular HD and D2 in amorphous semiconductors

P. Santos-Filho, M. P. Volz, R. Corey et al. · Journal of Non-Crystalline Solids · 1989 · 12 citations

Natural Sciences, Materials Science, Physics +14