Concepedia

Satoshi Uchino

SU

3

Publications

112

Citations

3

H-Index

2001

Active since

Affiliations

Kyushu University(Current)

Mitsubishi Heavy Industries (Japan)

Satoshi Uchino is an author at Kyushu University specializing in engineering, plasma theory, and applied physics.

ORCID

Top concepts

Publications per year

2001–2005

3

Publications

3

Measurements of the negative ion density in SF6/Ar plasma using a plane electrostatic probe

Masako Shindo, Satoshi Uchino, Ryuta Ichiki et al. · Review of Scientific Instruments · 2001 · 74 citations

, , +18

Characteristics of Very-High-Frequency-Excited SiH<sub>4</sub> Plasmas using a Ladder-Shaped Electrode

Yoshiaki Takeuchi, Hiroshi Mashima, Masayoshi Murata et al. · Japanese Journal of Applied Physics · 2001 · 26 citations

, , +10

Large area VHF plasma production using a ladder-shaped electrode

Hiroshi Mashima, Hideo Yamakoshi, Keisuke Kawamura et al. · Thin Solid Films · 2005 · 12 citations

, , +5

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