Statistics
Publications
1
Citations
14
H-Index
1
Active since
2004
Affiliations
Igor Jekauc is an author at Infineon Technologies (United States) specializing in materials science, semiconductor devices, and surface treatment.
Publications per year
2004–2004
1
1
Necessity of chemical edge bead removal in modern-day lithographic processing
Igor Jekauc, Michael M. K. Watt, Trip Hornsmith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 14 citations
Natural Sciences, Materials Science, Electronic Materials +5
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