Concepedia

R.D. Huttemann

RH

4

Publications

178

Citations

4

H-Index

1973

Active since

Affiliations

Bio Med Sciences (United States)(Current)

R.D. Huttemann is an author at Bio Med Sciences (United States) specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsSurface ScienceMaterials EngineeringElectrochemistryMicrofabricationOptical MaterialsElectronic Materials

Publications per year

1973–1988

4

Publications

4

Factors controlling the structure of sputtered Ta films

L.G. Feinstein, R.D. Huttemann · Thin Solid Films · 1973 · 103 citations

Materials Science, Materials Engineering, Engineering +6

Annealing and phase stability of tantalum films sputtered in Ar-O2

L.G. Feinstein, R.D. Huttemann · Thin Solid Films · 1974 · 28 citations

Materials Engineering, Materials Science, Engineering +8

Ammonium Hexafluorosilicate Formation during Plasma Etching of Silicon Nitride

W. R. Knolle, R.D. Huttemann · Journal of The Electrochemical Society · 1988 · 27 citations

Optical Materials, Engineering, Vacuum Device +16

Effect of Light Elements (N, C, O) in Tantalum on Tantalum Film Capacitor Properties

R.D. Huttemann, J.M. Morabito, D. Gerstenberg · IEEE Transactions on Parts Hybrids and Packaging · 1975 · 20 citations

Materials Science, Materials Engineering, Electrical Engineering +7

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