Statistics
Publications
2
Citations
88
H-Index
2
Active since
2002
Affiliations
S. Oberbeck is an author at Fraunhofer Institute for Microengineering and Microsystems specializing in engineering, pump design, and microfabrication.
Publications per year
2002–2011
2
2
A self-filling low-cost membrane micropump
K.-P. Kämper, J. Döpper, W. Ehrfeld et al. · 2002 · 65 citations
Engineering, Manufacturing Engineering, Mechanical Engineering +14
High vacuum side channel pump working against atmosphere
A. Shirinov, S. Oberbeck · Vacuum · 2011 · 23 citations
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