Concepedia

Yamato Samitsu

YS

Statistics

Publications

3

Citations

39

H-Index

3

Active since

1993

Affiliations

Advanced Institute of Industrial Technology(Current)

Yamato Samitsu is an author at Advanced Institute of Industrial Technology specializing in materials science, materials engineering, and silicon wafers.

Publications per year

1993–1998

3

Publications

3

Infeed Grinding of Silicon Wafers Applying Electrophoretic Deposition of Ultrafine Abrasives

Yukako Tani, Takaaki Saeki, Yamato Samitsu et al. · CIRP Annals · 1998 · 16 citations

, , +16

A Study of Atomic Scale Processing using an Atomic Force Microscope.

Yamato Samitsu · Journal of the Japan Society for Precision Engineering · 1995 · 13 citations · Full text

, , +15

A study of silicon-wafer surface evaluation using atomic force microscopy

Yamato Samitsu · Nanotechnology · 1993 · 10 citations

, , +17

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