Concepedia

Fred Buehrer

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Publications

1

Citations

14

H-Index

1

Active since

1997

Affiliations

IBM Research - Almaden(Current)

Fred Buehrer is an author at IBM Research - Almaden specializing in polymer chemistry, engineering, and chemical engineering.

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Publications per year

1997–1997

1

Publications

1

New ESCAP-type resist with enhanced etch resistance and its application to future DRAM and logic devices

Will Conley, William R. Brunsvold, Fred Buehrer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 14 citations

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