Concepedia

Xing Zhenyu

XZ

2

Publications

28

Citations

2

H-Index

2008

Active since

Affiliations

Soochow University(Current)

Xing Zhenyu is an author at Soochow University specializing in applied physics, engineering, and nanoelectronics.

Top concepts

Publications per year

2008–2008

2

Publications

2

Effect of low-frequency power on etching of SiCOH low-k films in CHF3 13.56MHz/2MHz dual-frequency capacitively coupled plasma

Chao Ye, Yi‐Jun Xu, Xiaojiang Huang et al. · Microelectronic Engineering · 2008 · 16 citations

, , +10

CHF <sub>3</sub> Dual-Frequency Capacitively Coupled Plasma by Optical Emission Spectroscopy

Yi‐Jun Xu, Chao Ye, Huang Xiao-Jiang et al. · Chinese Physics Letters · 2008 · 12 citations

, , +19

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