Fritz Macco

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Active since

2003

Affiliations

Fraunhofer Institute for Material and Beam Technology(Current)

Carl Zeiss (Germany)

Physikalisch-Technische Bundesanstalt

Fritz Macco is an author at Fraunhofer Institute for Material and Beam Technology specializing in beam spot size, optics, and optical instrumentation.

Publications per year

2003–2006

Publications

New laboratory EUV reflectometer for large optics using a laser plasma source

L. van Loyen, Thomas Boettger, Stefan Braun et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 25 citations

Engineering, Physics, Instrumentation +10

Characterization of the measurement uncertainty of a laboratory EUV reflectometer for large optics

Frank Scholze, Thomas Böttger, H. Enkisch et al. · Measurement Science and Technology · 2006 · 14 citations

Engineering, Physics, Instrumentation +14

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