Concepedia

Kazuma Tachibana

KT

Statistics

Publications

4

Citations

85

H-Index

4

Active since

2010

Affiliations

The University of Osaka(Current)

Kazuma Tachibana is an author at The University of Osaka specializing in materials science, surface science, and engineering.

Top concepts

EngineeringSurface ScienceMaterial ScienceMicrofabricationChemical EngineeringApplied PhysicsMicroelectronicsSurface EngineeringMaterials EngineeringMechanical Engineering

Publications per year

2010–2012

4

Publications

4

Dependence of Process Characteristics on Atomic-Step Density in Catalyst-Referred Etching of 4H–SiC(0001) Surface

Takeshi Okamoto, Yasuhisa Sano, Kazuma Tachibana et al. · Journal of Nanoscience and Nanotechnology · 2011 · 32 citations

Atomic-step Density, Engineering, Chemical Engineering +16

Improvement of Removal Rate in Abrasive-Free Planarization of 4H-SiC Substrates Using Catalytic Platinum and Hydrofluoric Acid

Takeshi Okamoto, Yasuhisa Sano, Kazuma Tachibana et al. · Japanese Journal of Applied Physics · 2012 · 23 citations

Engineering, Mechanical Engineering, Abrasive Process +16

Reduction of Surface Roughness of 4H-SiC by Catalyst-Referred Etching

Takeshi Okamoto, Yasuhisa Sano, Hideyuki Hara et al. · Materials science forum · 2010 · 18 citations

Materials Science, Materials Engineering, Electrical Engineering +12

Improvement of Removal Rate in Abrasive-Free Planarization of 4H-SiC Substrates Using Catalytic Platinum and Hydrofluoric Acid

Takeshi Okamoto, Yasuhisa Sano, Kazuma Tachibana et al. · Japanese Journal of Applied Physics · 2012 · 12 citations

Engineering, Mechanical Engineering, Abrasive Process +16

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