Concepedia

J.H. Kim

JK

1

Publications

26

Citations

1

H-Index

2003

Active since

Affiliations

Sungkyunkwan University(Current)

J.H. Kim is an author at Sungkyunkwan University specializing in applied physics, engineering, and microfabrication.

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Publications per year

2003–2003

1

Publications

1

High aspect ratio via etching conditions for deep trench of silicon

W.J. Park, J.H. Kim, S.M. Cho et al. · Surface and Coatings Technology · 2003 · 26 citations

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