K. Kh. Nussupov

Silicon carbide synthesized by RF magnetron sputtering in the composition of a double layer antireflection coating SiC/MgF2

K. Kh. Nussupov, S. Keiinbay, Assanali Sultanov · Optical Materials · 2022 · 29 citations

Materials Science, Magnetism, Electrical Engineering +9

Investigation of the formation of Si and SiC crystalline phases in room temperature C+ implanted Si

K. Kh. Nussupov, V.O. Sigle, N.B. Bejsenkhanov · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 21 citations

Materials Engineering, Materials Science, Room Temperature C+ +9

Structure and composition of silicon carbide films synthesized by ion implantation

K. Kh. Nussupov, S. K. Zharikov, T. K. Akhmetov et al. · Physics of the Solid State · 2014 · 17 citations

Structural properties and parameters of epitaxial silicon carbide films, grown by atomic substitution on the high-resistance (111) oriented silicon

K. Kh. Nussupov · Superlattices and Microstructures · 2017 · 15 citations

Materials Engineering, Materials Science, Structural Properties +8

X-ray reflectometry and simulation of the parameters of SiC epitaxial films on Si(111), grown by the atomic substitution method

K. Kh. Nussupov · Physics of the Solid State · 2017 · 14 citations