Ersoy Subaşı

Water assisted atomic layer deposition of yttrium oxide using tris(<i>N</i>,<i>N</i>′-diisopropyl-2-dimethylamido-guanidinato) yttrium(<scp>iii</scp>): process development, film characterization and functional properties

Lukas Mai, Nils Boysen, Ersoy Subaşı et al. · RSC Advances · 2018 · 64 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Tin(IV) Oxide from a Functionalized Alkyl Precursor: Fabrication and Evaluation of SnO₂-Based Thin-Film Transistor Devices

Lukas Mai, David Zanders, Ersoy Subaşı et al. · ACS Applied Materials & Interfaces · 2019 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +17

PEALD of HfO₂ Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases

David Zanders, Engin Çiftyürek, Ersoy Subaşı et al. · ACS Applied Materials & Interfaces · 2019 · 39 citations

Natural Sciences, Materials Engineering, Materials Science +17

Femtosecond laser patterning of graphene electrodes for thin-film transistors

Maren Kasischke, Ersoy Subaşı, Claudia Bock et al. · Applied Surface Science · 2019 · 23 citations · Full text

Engineering, Materials Engineering, Materials Science +16