Concepedia

Shaowu Xu

SX

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Publications

2

Citations

50

H-Index

2

Active since

2003

Affiliations

Beijing University of Technology(Current)

Shaowu Xu is an author at Beijing University of Technology specializing in applied physics, engineering, and materials engineering.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMaterials EngineeringThin FilmsNanotechnology

Publications per year

2003–2004

2

Publications

2

Crystallization control of sputtered Ta2O5 thin films by substrate bias

Anping Huang, Shaowu Xu, Mankang Zhu et al. · Applied Physics Letters · 2003 · 40 citations

Materials Engineering, Materials Science, Material Analysis +13

Oriented AlN films prepared with solid AlCl3 source by bias assisted Cat-CVD

Anping Huang, Guowei Wang, Shaowu Xu et al. · Materials Science and Engineering B · 2004 · 10 citations

Materials Science, Materials Engineering, Solid Alcl3 Source +7

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