Statistics
Publications
1
Citations
24
H-Index
1
Active since
2011
Affiliations
Pioneer (Japan)(Current)
Megumi Fujimura is an author at Pioneer (Japan) specializing in numerical simulation, monte-carlo modelling, and applied physics.
Publications per year
2011–2011
1
1
Enhanced resolution and groove-width simulation in cold development of ZEP520A
Takeru Okada, Jiro Fujimori, Makoto Aida et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 24 citations
Materials Science, Engineering, Electron-beam Lithography +13
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