Liuhaodong Feng

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Active since

2022

Affiliations

Shanghai Industrial Technology Institute(Current)

Shanghai University

Shanghai Institute of Microsystem and Information Technology

Liuhaodong Feng is an author at Shanghai Industrial Technology Institute specializing in temperature measurement, thin films, and thermocouple-based sensing.

ORCID

Publications per year

2022–2023

Publications

A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy

Shuo Chen, Liuhaodong Feng, Song Guo et al. · Sensors · 2023 · 15 citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +17

Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement

Song Guo, Liuhaodong Feng, Shuo Chen et al. · Sensors · 2022 · 11 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application

Liuhaodong Feng, Shuwen Zeng, Yongquan Su et al. · Micromachines · 2022 · 10 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

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