H. Lüthje

Micro force sensor with piezoresistive amorphous carbon strain gauge

Erwin Peiner, A. Tibrewala, Ralf Bandorf et al. · Sensors and Actuators A Physical · 2006 · 69 citations

Materials Science, Engineering, Soft Robotics +4

Preparation of cubic boron nitride films by use of electrically conductive boron carbide targets

H. Lüthje, K. Bewilogua, S. Daaud et al. · Thin Solid Films · 1995 · 66 citations

Materials Engineering, Cubic Boron, Materials Science +8

Transport and optical properties of amorphous carbon and hydrogenated amorphous carbon films

A. Tibrewala, Erwin Peiner, Ralf Bandorf et al. · Applied Surface Science · 2006 · 66 citations

Materials Science, Amorphous Carbon, Optical Materials +8

Diamond-like carbon for MEMS

Erwin Peiner, A. Tibrewala, Ralf Bandorf et al. · Journal of Micromechanics and Microengineering · 2007 · 50 citations

Multifunctional thin film sensors based on amorphous diamond-like carbon for use in tribological applications

Saskia Biehl, H. Lüthje, Ralf Bandorf et al. · Thin Solid Films · 2006 · 41 citations

Materials Science, Diamond-like Carbon, Tribological Coating +9