Statistics
Publications
1
Citations
70
H-Index
1
Active since
2021
Affiliations
Yeungnam University(Current)
Shigeyuki Ohtake is an author at Yeungnam University specializing in materials science, film thickness, and materials chemistry.
Publications per year
2021–2021
1
1
Atomic Layer Deposition of Ru for Replacing Cu-Interconnects
Yohei Kotsugi, Seung‐Min Han, Youn‐Hye Kim et al. · Chemistry of Materials · 2021 · 70 citations
Natural Sciences, Materials Engineering, Materials Science +16
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