Pavel Mareš

Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude

Tomáš Kozák, Andrea Dagmar Pajdarová, Martin Čada et al. · Plasma Sources Science and Technology · 2020 · 34 citations

Superior high-temperature oxidation resistance of magnetron sputtered Hf–B–Si–C–N film

P. Zeman, Š. Zuzjaková, Pavel Mareš et al. · Ceramics International · 2015 · 29 citations

Materials Science, Materials Engineering, Engineering +6

Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution

Andrea Dagmar Pajdarová, Tomáš Kozák, Zdeněk Hubička et al. · Plasma Sources Science and Technology · 2020 · 28 citations

Langmuir Probe, Engineering, Glow Discharge +21

High deposition rate films prepared by reactive HiPIMS

Pavel Mareš, Martin Dubau, Jan Polášek et al. · Vacuum · 2021 · 22 citations

Materials Engineering, Materials Science, Engineering +6

Effect of the Si content on the microstructure of hard, multifunctional Hf–B–Si–C films prepared by pulsed magnetron sputtering

Minghui Zhang, Jiechao Jiang, Pavel Mareš et al. · Applied Surface Science · 2015 · 20 citations

Materials Science, Magnetism, Magnetic Properties +8