Concepedia

A. Heindl

AH

1

Publications

13

Citations

1

H-Index

2012

Active since

Affiliations

Suss Microoptics (Switzerland)(Current)

A. Heindl is an author at Suss Microoptics (Switzerland) specializing in computer engineering, microfabrication, and engineering.

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Publications per year

2012–2012

1

Publications

1

Mask aligner lithography simulation – From lithography simulation to process validation

Kristian Motzek, Stefan Partel, Arianna Bramati et al. · Microelectronic Engineering · 2012 · 13 citations

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