Statistics
Publications
13
Citations
398
H-Index
12
Active since
2003
D. Vempaire is an author at Centre National de la Recherche Scientifique specializing in engineering, applied physics, and materials science.
Publications per year
2003–2010
13
13
Radical surface interactions in industrial silicon plasma etch reactors
G. Cunge, D. Vempaire, R. Ramos et al. · Plasma Sources Science and Technology · 2010 · 46 citations
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1–5 of 13