Kevin E. Speller

MEMS characterization using Laser Doppler Vibrometry

Eric M. Lawrence, Kevin E. Speller, Duli Yu · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 37 citations

A low-noise MEMS accelerometer for unattended ground sensor applications

Kevin E. Speller, Duli Yu · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 33 citations

Engineering, Measurement, Accelerometer +16

<title>Unique MEMS characterization solutions enabled by laser Doppler vibrometer measurements</title>

Kevin E. Speller, H. Goldberg, Jeff Gannon et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 14 citations

Mems Devices, Engineering, Measurement +18

<title>Laser Doppler vibrometry for optical MEMS</title>

Eric M. Lawrence, Kevin E. Speller, Duli Yu · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 12 citations

Engineering, Optical Testing, Mechanical Engineering +18