W Frey

Wafer level anti-stiction coatings for MEMS

W. Robert Ashurst, Carlo Carraro, Roya Maboudian et al. · Sensors and Actuators A Physical · 2003 · 105 citations

Materials Science, Wafer Scale Processing, Engineering +6

Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer

Gary K. Fedder, W Frey, Z.Y. Pan et al. · TechConnect Briefs · 2003 · 22 citations

Engineering, Microfabrication, Accelerometer +5

Monocrystalline Si waffles for thin solar cells fabricated by the novel perforated-silicon process

Rolf Brendel, H. Artmann, S. Oelting et al. · Applied Physics A · 1998 · 21 citations

Materials Science, Thin Solar Cells, Electrical Engineering +14

A small size high pressure sensor based on metal thin film technology

A. Stoetzler, Dirk Dittmann, Ralf Henn et al. · 2007 · 11 citations

Engineering, Basic Design, Gas Sensor +17

Porous silicon technique for realization of surface micromachined silicon structures with large gaps

H. Artmann, W Frey · Sensors and Actuators A Physical · 1999 · 10 citations

Materials Science, Wafer Scale Processing, Engineering +10